Gas Flow Measurement and Control

Azbil’s products with mass flow sensors provide gas flow measurement and control with quick response, low pressure drops, and wide measurement ranges.


  • Air Mass Flow Sensors Model MCS

    “Azbil MCS100 Air Mass Flow Sensors are compact, fast response air mass flow sensors. With its combination of thermal MEMS sensor and a flow path with low-pressure loss, the MCS can measure air flows under 10L/min with a fast 5 ms response and is unaffected by changes in pressure and temperature. The sensor is located in the pope wall and detects slight flow rate differences. Symmetric structure measures reverse flow as well. Any mount position is okay, and there is no need for a straight pipe section with low-pressure loss (models with built-in flow rectifier). Bidirectional flow range models are available. Only weighs 9 g. Pipe size 1/8” (MS female [brass insert]). Flow range -3 to 3 L/min, 0 to 3 L/min, -0.5 to 0.5 L/min, 0 to 0.5 L/min and 0 to 10 L/min depending on the model. Accuracy ±5% FS or ±6 FS depending on the model. Operating temperature 32°F (0°C) to 122°F (50°C) for both ambient and gas temperatures. Operating humidity 10 to 80% RH, no condensation allowed. Operating pressure –100 to 200 kPa (range for assured pressure characteristics: -70 to 200 kPa). 1-5V output (non-linear). Low power consumption (12 mA max. at 24 Vdc). CE approved.

    Panel mount indicator for MCS100 available (Model MCW401A100), sold separately. Compatible MCS100 models: MCS100A100, MSC100A104, MCS100A108, MCS100A112 and MCS11A120”


  • Digital Mass Flow Controller Model MQV

    “Azbil MQV Digital Mass Flow Controller for Hydrogen and Helium Gases Models features high-performance mass flow controllers that incorporate a thermal mass flow sensor developed by Azbil Corporation, the µF (Micro Flow) sensors, in addition to a proportional solenoid valve and advanced actuator control technology. Advanced 300 ms* high-speed control can be used for low differential pressure work. The ultra-high-speed response Micro Flow sensor and unique PID tuning realize exceptionally high-speed response in reaching the set flow rate from a fully closed state. The MQV also responds quickly to changes in the primary pressure, minimizing the effect on the flow rate on the secondary side. Selectable control range, power circuit isolation, and emphasis on usability. The MQV series does not use capillaries that have large pressure loss, so the MGV series can control in the low-pressure difference. The MQV Series comes with a multitude of standard functions such as flow rate, indication and totalizing. A convenient personal computer loader function has been integrated as a standard feature. The MLP loader software, which is sold separately, allows not only configuration of various settings, but also monitoring of flow rate trends and other operating status information on the PC screen. Acquired data can also be saved on a CSV file. The power circuit is isolated from analog I/O circuits. If multiple MQV controllers are connected to analog I/O by a PLC or the like, there is no need to use an isolated circuit in the analog module on the PLC side. A common power supply can be used to supply power to the MQV. MQV controller can operate at a allow differential pressure of 50 kPa or less. An AC adaptor is available that is suitable for use in laboratory setting or for similar application. On models with an integrated display, the display direction can be changed 180 degrees. Pipe size (B) ¼” and ½”. Flow range .5 L/min to 200 L/min. Operating temperature 14 °F (-10 °C) to 140 °F (60 °C). Operating humidity 10 to 90% RH, no condensation allowed. Output 0-5V dc / 1 – 5 V dc / 0-20MA dc 4 – 20 mA dc (selectable). CE approved.

    *500 ms for the MQV9005/9200/9050B and C, 700 ms for the MQV0050/0200/0500/1000J and K”


  • Gas Flow Meter Model CMG

    “Azbil CMG compact, high-accuracy gas flow meters for monitoring Butane and Propane offer mass flow measurement with high speed 2 m response that is unaffected by changes in pressure and temperature. The flow meters employ Azbil Corporations µF (Micro Flow) thermal flow rate sensors as the sensing element. The sensor is located on the pipe wall. Symmetric structure measures reverse flow as well. The sensor is located on the pipe wall. High repeatability, ± 6%. Pipe size (B) 1/2″”, 1″”, 1 1/2″” and 2″”, flow rate range 4 m3 /h to 150 m3/h. Operating temperature 14 °F (-10 °C) to 140 °F (60 °C), no condensation allowed. Operating pressure 0 to 100 kPa. Sampling time100 ms ± 10%. Ambient humidity 90% RH at 40°C, no condensation allowed. Alarm contact output. Output signal 1 – 5 V/ 4 – 20 mA, selectable by model number. The gas flow monitor digital indication of instantaneous/integrated flow is visible from a distance, and its measurement status can be indicated by Hi, Lo, OVER, ALARM LEDs. The self-diagnostic function is effective for troubleshooting. Protective structure IP54 (rating is based on JIS C 0920), the device is dustproof and splash-proof. CE approved (24 Vdc model only).

    “Azbil CMG compact, high-accuracy gas flow meters for monitoring Natural Gas (13A) and Air offer mass flow measurement with high speed 2 m response that is unaffected by changes in pressure and temperature. The flow meters employ Azbil Corporations µF (Micro Flow) thermal flow rate sensors as the sensing element. The sensor is located on the pipe wall. Symmetric structure measures reverse flow as well. High repeatability, accuracy ± 4% RD. Pipe size (B) 1/2″”, 1″”, 1 1/2″” and 2″”, flow rate range 4 m3 /h to 150 m3/h. Operating temperature 14 °F (-10 °C) to 140 °F (60 °C), no condensation allowed. Operating pressure 0 to 100 kPa. Sampling time 100 ms ± 10%. Ambient humidity 90 % RH at 40 °C, no condensation allowed. Alarm contact output. Output signal 1 – 5 V/ 4 – 20 mA, selectable by model number. The gas flow monitor digital indication of instantaneous/integrated flow is visible from a distance, and its measurement status can be indicated by Hi, Lo, OVER, ALARM LEDs. The self-diagnostic function is effective for troubleshooting. Protective structure IP54 (rating is based on JIS C 0920), the device is dustproof and splash-proof. CE approved (24vdc model only).


  • Gas Mass Flow Meter Model CMS

    “Azbil CMS Gas Mass Flow Meters for Hydrogen and Helium Gases are equipped with Azbil Corporations µF (Micro Flow) sensors, which can detect even the slightest gas flow. The flow meters provide mass flow measurement of gas with high speed 2 m response that is unaffected by changes in pressure and temperature. The CMS incorporates a microflow sensor built with silicon micromachining and thin-film technologies. The Symmetric structure measures reverse flow as well. The sensor is located on the pipe wall. High repeatability with ±0.5% FS., high accuracy ± 5% rdg. Pipe size (B) 1/4″” and 1/2″”, flow rate range 0.6 L/min to 2000 L/min. Operating temperature 14 °F (-10 °C) to 140 °F (60 °C). Operating pressure –0.07 to 1 MPa. Sampling time 100 ms ± 20 ms. Analog output signals can be switched among 0 – 5 V, 1 – 5 V and 4 – 20 mA output, selectable using keys on the CMS body. Gas-contracting parts: 316 stainless steel, Flourorubber. RS-485 option available. Inspection results and traceability certificate models available

    CMS functions include instantaneous flow rate indication, totalized or reverse-totalized flow display, event output, totalizer pulse output, totalized flow reset input, output scaling, gas type switching, etc. for a variety of applications. CMS gas flowmeters are CE approved.”
    “Azbil CMS Stainless Steel / 316 Stainless Steel Gas Mass Flow Meters are equipped with Azbil Corporations µF (Micro Flow) sensors, which can detect even the slightest gas flow. The flow meters. provide mass flow measurement of gas with high speed 2 m response that is unaffected by changes in pressure and temperature. The CMS incorporates a microflow sensor built with silicon micromachining and thin-film technologies. The Symmetric structure measures reverse flow as well. High repeatability, accuracy ± 3% rdg. 100:1 measurement range, pipe size (B) 1/4″” and 1/2″”, flow rate range 2 L/min to 500 L/min depending on the model. Operating temperature 14 °F (-10 °C) to 140 °F (60 °C). Operating pressure –0.07 to 1MPa. Sampling time 100 ms ± 20 ms. Analog output signals can be switched among 0-5V, 1-5 V and 4-20 mA output, selectable using keys on the CMS body. Gas-contracting parts: 304 stainless steel or 316 stainless steel (depending on the model), Flourorubber. RS-485 option available for 316 stainless steel models. Inspection results and traceability certificate models available.

    CMS functions include instantaneous flow rate indication, totalized or reverse-totalized flow display, event output, totalizer pulse output, totalized flow reset input, output scaling, gas type switching, etc. for a variety of applications. CMS gas flowmeters are CE approved.”


  • Model:MCF*** Air Flow Meters

    Azbil MCF Air Flow Meters DC 24 V model provides mass flow measurement of compressed air and nitrogen with high speed 2 m response that is unaffected by changes in pressure and temperature. The flowmeters employ Azbil Corporations µF (Micro Flow) thermal flow rate sensors as the sensing element. The sensor is located on the pipe wall. The MFC is equipped with a reverse flow detection function that us useful for loop piping, a normal/reverse flow detection function and more. It has high repeatability. Accuracy ± 3% FS, Measurement range 50:1, minimum flow rate 100:1. Pipe size (B) 1/4″, 1/2″, 1″, 1 1/2″ and 2″. Flow rate range 200 L/min to 12000 L/min. Operating temperature 14°F (-10 °C) to 140 °F (60 °C) without freezing. Operating humidity 0 to 90% RH (without condensation) Operating pressure -0.07 to 1.0 MPa. Sampling time 50 ms to 1.5 s max (time until 95% of response to 0 → 100% FS step input). Output signal 4 to 20 mA, allowable load resistance 300 Ω max. Modbus option available. Protective structure IP65 (rating is based on JIS C 0920 and IEC529 for purposes of installation indoors), device is waterproof and dustproof. Models available where the measurement unit can be dismounted and replaced for easy maintenance at the application without disconnecting the pipes. CE approved (DC power only).


  • Panel-Mount Mass Flow Controller Model MPC

    Azbil MPC Panel Mount Mass Flow Controllers are small and light. Compact (front panel: 48mm square x 72.7 mm deep) and light. (300 g) mounting body contains a built-in miniature proportioning valve, enabling full-automatized flow control. The controller incorporates a thermal micro-flow sensor developed by Azbil Corporation and an extremely compact proportional solenoid valve. The controller offers easy operation and easy mounting even for the purgemeter users. Once you set the flowrate set point, all the operations are automatically done by the MPC. External set point change (from PLC to host systems) is easy, using optional analog setting input function or communication function (RS-485). The MPC Flow Controllers µF (Micro Flow) sensor with high speed (1 s), high accuracy (2% FS) flow control is unaffected by pressure and temperature fluctuations. There are a variety of functions available as standard offering equipment cost reduction. These include: Multi set point function, gas type switching, operation mode switching, slow start function, flowrate integration function, alarm indication/output/automatic shut-off, event indication/output, “OK” indication/output, Automatic shut-off function, valve drive output monitor and standard support of the loader communication. Pipe size (B) 1/8”. Flow range 0.5 L/min to 20 L/min. Accuracy ±2% FS, operating temperature 14°F (-10°C) to 122°F (50°C). Operating humidity 10 to 90% RH (non-condensing).Operating differential pressure 50 to 3000 kPa psi. Smart Loader connection (standard), RS-485 communication (option). Power supply 24V dc. CE approved.


  • Vortex Gas Flow Meter Model MVF

    Azbil MVF□□□□□□□011□□□0 series of Micro Flow Vortex Gas Flowmeter incorporates a µF (Micro Flow) sensor made by silicon micro-machining and thin film technologies. Because a high-sensitivity, quick response sensor that is a mere 1.7 mm square and 0.5 mm thick is used for the detection of the vortex frequency, a wide measurement range of 100:1 has been achieved. Since this flowmeter covers such a wide measurement range in the service flow range, they can be used for popes with unknown rate, without worrying about selecting a suitable model. Since Temperature and pressure compensation functions are integrated, there is no need to use temperature and pressure sensors and compensation devices, thus reducing the cost of ownership. Comprehensive interfaces such as 4 to 20 mA instantaneous flow rate output, pulse output for totalization communications functions (RS-485 communication), etc. are integrated as standard functions. Therefore this device can be used in combination with a wide variety of external devices. The instantaneous flow rate / total flow display enables easy confirmation of these values at the work site. IP67 structure for outdoor applications, CE marked.