Azbil Model CMS_ _ _ _ Gas Mass Flow Meters for Hydrogen and Helium Gases are equipped with Azbil Corporations µF (Micro Flow) sensors, which can detect even the slightest gas flow. The flow meters provide mass flow measurement of gas with high speed 2 ms response that is unaffected by changes in pressure and temperature. The Model CMS_ _ _ _incorporates a microflow sensor built with silicon micromachining and thin-film technologies. The Symmetric structure measures reverse flow as well. The sensor is located on the pipe wall. High repeatability with ±0.5% FS., high accuracy ± 5% rdg. Pipe size (B) 1/4″ and 1/2″, flow rate range 0.6 L/min to 2000 L/min. Operating temperature 14 °F (-10 °C) to 140 °F (60 °C). Operating pressure –0.07 to 1 MPa. Sampling time 100 ms ± 20 ms. Analog output signals can be switched among among 0 to 5V, 1 to 5 V and 4 to 20 mA output, selectable using keys on the CMS body. Gas-contacting parts: 316 stainless steel, Flourorubber. RS-485 option available. Inspection results and traceability certificate models available

Functions include instantaneous flow rate indication, totalized or reverse-totalized flow display, event output, totalizer pulse output, totalized flow reset input, output scaling, gas type switching, etc. for a variety of applications. The flowmeters are CE approved.

Azbil Model CMS _ _ _ _ Stainless Steel / 316 Stainless Steel Gas Mass Flow Meters are equipped with Azbil Corporations µF (Micro Flow) sensors, which can detect even the slightest gas flow. The flow meters provide mass flow measurement of gas with a high speed 2 ms response that is unaffected by changes in pressure and temperature. The model CMS_ _ _ _ incorporates a micro flow sensor built with silicon micromachining and thin-film technologies. The Symmetric structure measures reverse flow as well. High repeatability, accuracy ± 3% rdg. 100:1 measurement range, pipe size (B) 1/4″ and 1/2″, flow rate range 2 L/min to 500 L/min depending on the model. Operating temperature 14 °F (-10 °C) to 140 °F (60 °C). Operating pressure –0.07 to 1MPa. Sampling time 100 ms ± 20 ms. Analog output signals can be switched among 0 to 5V, 1 to 5 V and 4 to 20 mA output, selectable using keys on the CMS body. Gas-contacting parts: 304 stainless steel or 316 stainless steel (depending on the model), Flourorubber. RS-485 option available for 316 stainless steel models. Inspection results and traceability certificate models are available.

Functions include instantaneous flow rate indication, totalized or reverse-totalized flow display, event output, totalizer pulse output, totalized flow reset input, output scaling, gas type switching, etc. for a variety of applications. CMS gas flowmeters are CE approved.