Azbil CMS Gas Mass Flow Meters for Hydrogen and Helium Gases are equipped with Azbil Corporations µF (Micro Flow) sensors, which can detect even the slightest gas flow. The flow meters provide mass flow measurement of gas with high speed 2 m response that is unaffected by changes in pressure and temperature. The CMS incorporates a microflow sensor built with silicon micromachining and thin-film technologies. The Symmetric structure measures reverse flow as well. The sensor is located on the pipe wall. High repeatability with ±0.5% FS., high accuracy ± 5% rdg. Pipe size (B) 1/4″” and 1/2″”, flow rate range 0.6 L/min to 2000 L/min. Operating temperature 14 °F (-10 °C) to 140 °F (60 °C). Operating pressure –0.07 to 1 MPa. Sampling time 100 ms ± 20 ms. Analog output signals can be switched among 0 – 5 V, 1 – 5 V and 4 – 20 mA output, selectable using keys on the CMS body. Gas-contracting parts: 316 stainless steel, Flourorubber. RS-485 option available. Inspection results and traceability certificate models available
CMS functions include instantaneous flow rate indication, totalized or reverse-totalized flow display, event output, totalizer pulse output, totalized flow reset input, output scaling, gas type switching, etc. for a variety of applications. CMS gas flowmeters are CE approved.