Sapphire Capacitance Diaphragm Gauges

We offer high-efficiency, high-quality, easy-to-use Sapphire Capacitance Diaphragm Gauges developed with the latest technologies. The front-end film deposition and etching processing use various gases that may cause film deposits on the sensor diaphragm of the vacuum gauge used in these processes, resulting in a shift of its zero point. These shifts can require film deposition and etching equipment operators to adjust the vacuum gauge more frequently, slowing down the manufacturing process. Azbil’s Sapphire capacitance Diaphragm gauges were designed to reduce Zero Point Shift.

Sapphire Capacitance Diaphragm Gauge (Pressure or Vacuum) Model SPG5A: Standard and Model SPG6A: Extra High-Temperature


Azbil Sapphire Capacitance Diaphragm Vacuum Gauge (Pressure or Vacuum) Model SPG5A: Standard and Model SPG6A: Extra High-Temperature use a sapphire capacitance pressure sensor to achieve…

Sapphire Capacitance Diaphragm Gauges / Sapphire Capacitance Diaphragm Gauge Integrated Model V8C


Creating a high-precision vacuum is vital for manufacturing processes such as semiconductors and freeze-drying. A Capacitance Diaphragm Gauge is an essential component for high-precision vacuum…

Sapphire Capacitance Diaphragm Gauges / Sapphire Capacitance Diaphragm Gauge Separated Model V8S


The Model V8S compact design features a control unit separate from the gauge head, allowing it to handle temperatures as high as 250 °C often…