Sensors / Pressure Sensors

Sapphire Capacitance Diaphragm Gauge (Pressure or Vacuum) Model SPG5A: Standard and Model SPG6A: Extra High-Temperature

Sapphire Capacitance Diaphragm Gauge (Pressure or Vacuum) Model SPG5A: Standard and Model SPG6A: Extra High-Temperature

Azbil Sapphire Capacitance Diaphragm Vacuum Gauge (Pressure or Vacuum) Model SPG5A: Standard and Model SPG6A: Extra High-Temperature use a sapphire capacitance pressure sensor to achieve high accuracy and reliability and are built to keep zero shift. The gauges are compact and lightweight. Self-heating models are available (45 °C, 125 °C, 150 °C, 160 °C, 180 °C, and 200 °C). The Sapphire Capacitance Diaphragm Gauges are especially suited for semiconductor manufacturing. Resolution is 1/10000FS. Gas -contacting materials sapphire, DSALOY (equivalent to Inconel), SUS316L. The gauges uses a single-crystal sapphire for excellent resistance to corrosion and high temperatures. Capacitive measurement has high repeatability even when used at high temperatures. Microprocessor-based digital PID control provides fast warm-up and stable sensor temperature (self-heating models), improving temperature management and reducing startup time. Easy zero-point adjustment with automatic adjustment buttons or up/down buttons. The zero-adjustment range is a wide ±20% FS, allowing long replacement/ calibration intervals and lower running costs. Status display LEDs show event output and vacuum gauge state (normal, warm-up in progress, and abnormal) at a glance. The gauges are equipped with 3 event replays that can be used for interlocks and 3 outputs status alarms for event settings like instrumentation abnormalities, warm-up finished and upper/lower pressure limits, etc. Working from a PC, user can monitor the gauges and easily change its settings using the Model SLP-SP5J70 Smart Loader-Package (sold separately). Conformity to IEC directive; CE -marked: compliant with EN 61326 and EN 50011.

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