Sensors

SPG5A/SPG6A Sapphire Capacitance Diaphragm Vacuum Guage


SPG5A/SPG6A Sapphire Capacitance Diaphragm Vacuum Guage

SPG5A/SPG6A Sapphire Capacitance Diaphragm Vacuum Guage

The SPG5A and SPG6A capacitance diaphragm vacuum gauges use a sapphire capacitance pressure sensor to achieve high accuracy and reliability, compact size, and light weight. Self-heating and nonself-heating models are available. The SPG5A/6A is especially suited for use in semiconductor manufacturing.

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