Gas Flow Measurement and Control

CMS1500 Series Gas Mass Flow Meter


CMS1500 Series Gas Mass Flow Meter

CMS1500 Series Gas Mass Flow Meter

The CMS1500 is a gas mass flow meter that employs our proprietary Micro Flow rate sensor as the sensing element. Through integration of this ultraminiature mass flow sensor, which is manufactured using micromachining technology and advanced ultrafine channel design, an unprecedented level of high accuracy and wide measurement range have been achieved at low cost. Boasting both ease of use and high reliability, these flow meters will set the standard for the future.

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