Gas Flow Measurement and Control

CMS Series Gas Mass Flow Meter


CMS Series Gas Mass Flow Meter

CMS Series Gas Mass Flow Meter

The CMS series of gas flow meters employ our proprietary Micro Flow thermal flow sensor as the sensing element. Through integration of this ultraminiature mass flow sensor, which is manufactured using micromachining technology and advanced ultrafine channel design, an unprecedented level of high accuracy and wide measurement range have been achieved at low cost. Boasting both ease of use and high reliability, these flow meters will set the standard for the future.

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