CMS1500 Gas Mass Flow Meter with Aluminum Body
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Description
CMS1500 Gas Mass Flow Meter with Aluminum Body
Overview
The CMS1500 is a highly reliable gas mass flow meter that uses Yamatake's µF (MicroFlow) sensor as its sensing element. The µF sensor is a MEMS thermal mass-flow sensor cpable of measuring ultra-low flow rates. The integration of the µF sensor and advanced channel design technology has achieved high accuracy and high rangeability at a low cost.
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Specifications
See Specification Sheet for complete product details.
| Model No. |
CMS1500 |
| Gas Types |
Air, Nitrogen, Argon, CO2 (Note that gas must be dry, without corrosive components such as chlorine, sulfur and acid. It must also be clean, without dust or oil.) |
| Flow Rate Range |
CMS1500: 1000L/min (standard)“standard” indicates volume flow per min. converted to the conditions of 20¢ªC and 1atm |
| Measurement Accuracy |
1/5 to 1/1 of flow rate range: ±5% of Reading1/100 to 1/5 of flow rate range: ±1% of Full Scale |
| Material in Gas Flow Passage |
Aluminum |
| Pressure Range |
0 to 0.6MPa |
| Power Supply |
12 to 24Vdc |
| Current Consumption |
100mA max. |
| Sampling cycle |
100ms ±10% |
| Output |
0-5Vdc, 1-5Vdc, 4-20mA (selectable) |
Benefits
- MircoFlow sensor offers high accuracy of ±5%RD
- High Resolution of 0.1L/min
- Functions include flow rate/integrated flow rate indication, analog ouptut, event output and analog output scaling
- MicroFlow sensor eliminates need for straight run piping upstream of meter
- Up to five CMS units can be connected to a single dedicated CMW100A multi-channel indicator
