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CMS Series Gas Mass Flow Meter
CMS Series Gas Mass Flow Meter



Description

CMS Series Gas Mass Flow Meter


Overview

The CMS is a highly reliable gas mass flow meter that uses Yamatake's µF (MicroFlow) sensor as its sensing element. The µF sensor is a MEMS thermal mass-flow sensor cpable of measuring ultra-low flow rates. The integration of the µF sensor and advanced channel design technology has achieved high accuracy and high rangeability at a low cost.


Specifications

See Specification Sheet for complete product details.

Model No. CMS0020 CMS0050 CMS0200
Gas Types Air/nitrogen (Note that gas must be dry, without corrosive components such as chlorine, sulfur and acid.  It must also be clean, without dust or oil.)
Flow Rate Range 20L/min (standard) 50L/min (standard) 200L/min (standard)
“standard” indicates volume flow per min. converted to the conditions of 20¢ªC and 1atm
Measurement Accuracy

±5%RD ±1 digit 4 to 20L/min (std)
±0.2L/min (std) ±1 digit 0 to 4 L/min

±5%RD ±1 digit 5 to 50L/min (std)
±0.2L/min (std) ±1 digit 0 to 5L/min
±5%RD ±1 digit 20 to 200L/min (std) 
Material in Gas Flow Passage Resin model: Flow passage (PBT), connection unit (aluminum die cast  SUS model: SUS303 SUS303
Output Scaling 0 to 2,  5, 10, 20L/min (std) selectable 0 to 20, 30, 50L/min (std) Selectable 0 to 20, 50, 100, 200L/min (std) Selectable
Applicable Gases Resin model: Air, Nitrogen, Argon, CO2SUS model: Air, Nitrogen, Argon, CO2, O2, City gas 13 A (LNG) Methane 100%, Propane 100%, Butane 100%
Operating Temperature 0 to 50¢ªC(Guaranteed accuracy range is 20 to 35¢ªC)
Humidity 10 to 90% RH (non-condensing)
Pressure Range 0 to 0.5MPa
Pressure Resistance Resin model: 735kPa; SUS model: 980kPa
Power Supply 12 to 24Vdc
Current Consumption 100mA max.
Sampling cycle 100ms ±20ms
Output Signal Instantaneous flow rate: 0 to 5VdcEvent: Open Collector x 2 points
Event Function 2 points
External Input Dedicated for integration count: 1 point
Flow Rate indication 7-segment, 4-digit LCD

Benefits

  • MircoFlow sensor offers high accuracy of ±5%RD
  • High Resolution of 0.1L/min
  • Functions include flow rate/integrated flow rate indication, analog ouptut, event output and analog output scaling
  • MicroFlow sensor eliminates need for straight run piping upstream of meter
  • Up to five CMS units can be connected to a single dedicated CMW100A multi-channel indicator